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Vacuum arc deposition of a cathodes method (Cathodic Arc Vapor Deposition) was used for deposition of multilayered coatings, based on TiN/ZrN systems, with different thickness of bilayers. Total th ickness of the coatings was 11-19 μm, thickness of bilayers varied from 39 to 305 nm for different samples depending on deposition conditions. Such methods as X-Rays diffraction (XRD), Rutherford Backscattering (RBS), scanning electron microscopy (SEM) with
microanalysis (EDS), high-resolution transmission electron microscopy (HR-TEM) and STEM with local microanalysis, as well as nanoindentation were used for investigations.
Microstructure of the coatings and their wear resistance, as well as mechanical and tribologica
l properties, were explored. Influence of the bilayer thickness on such properties mechanical
and tribological of the coatings, as hardness, elasticity modulus, wear resistance and wear ratio were explored.
