Structural analysis of multilayer metal nitride films CrN/MoN using electron backscatter diffraction (EBSD)
Fragment książki (Materiały konferencyjne)
MNiSW
15
WOS
| Status: | |
| Autorzy: | Postolnyi Bogdan O., Bondar Oleksandr V., Opielak Marek, Rogalski Przemysław, Araujo Joao Pedro |
| Wersja dokumentu: | Drukowana | Elektroniczna |
| Arkusze wydawnicze: | 0.5 |
| Język: | angielski |
| Web of Science® Times Cited: | 3 |
| Scopus® Cytowania: | 17 |
| Bazy: | Web of Science | Scopus | Web of Science Core Collection | EBSCO | INSPEC | SPIE Digital Library |
| Efekt badań statutowych | NIE |
| Materiał konferencyjny: | TAK |
| Nazwa konferencji: | 8th International Conference on Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies (ATOM-N) |
| Termin konferencji: | 25 sierpnia 2016 do 28 sierpnia 2016 |
| Miasto konferencji: | Constanta |
| Państwo konferencji: | RUMUNIA |
| Publikacja OA: | NIE |
| Abstrakty: | angielski |
| The electron backscatter diffraction (EBSD) analysis method was used for studying structure and properties of multilayer nitride CrN/MoN coatings fabricated by cathode arc physical vapour deposition (Arc-PVD). Samples were deposited on steel substrate with different single layer thickness from tens nanometers to 1 micron and with total thickness of coatings up to 8-13 μm. Colour grains mapping, grain size distribution profiles, pole figures and texture analyses were the main research instruments. Studying of obtained coatings was performed on specially prepared polished cross-section samples. The dependence between single layer thickness and grain size of materials, which is also changing through depth profile of the coating, was observed. In addition, it was possible to study phase composition, prevailing crystals orientation, dominant texture and grains growth. Studying of grains size, as well as other indicated parameters, is a very important task because it gives an information about grains interfaces volume, which causes changes in mechanical properties of material. Obtained results were cross-checked by X-ray diffraction analysis (XRD) where it was possible. © (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only. |
