Nichrome micro-heaters as actuators for microfluidic sensors
Fragment książki (Materiały konferencyjne)
MNiSW
15
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| Status: | |
| Autorzy: | Gęca Mateusz, Lizak Tomasz, Kociubiński Andrzej, Borecki Michał, Korwin-Pawlowski Michael L. |
| Wersja dokumentu: | Drukowana | Elektroniczna |
| Arkusze wydawnicze: | 0,5 |
| Język: | angielski |
| Strony: | 579 - 586 |
| Web of Science® Times Cited: | 1 |
| Scopus® Cytowania: | 4 |
| Bazy: | Web of Science | Scopus |
| Efekt badań statutowych | NIE |
| Materiał konferencyjny: | TAK |
| Nazwa konferencji: | Conference on Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments |
| Skrócona nazwa konferencji: | SPIE-IEEE-PSP 2016 |
| URL serii konferencji: | LINK |
| Termin konferencji: | 29 maja 2016 do 6 czerwca 2016 |
| Miasto konferencji: | Wilga |
| Państwo konferencji: | POLSKA |
| Publikacja OA: | NIE |
| Abstrakty: | angielski |
| MEMS actuators are currently widely used in the industry. Micro-heaters, being a prime example, attracted much attention in recent years due to their good operating parameters and low cost fabrication process. This paper focuses on a design and development of a micro-heater to be used as an actuator in a multiparametric capillary sensor. The micro-heater is an evolution of a previous design and uses a 200nm-thick thin film of 80/20 NiCr alloy as a heating layer. The paper presents results of fabrication and testing of the micro-heater, including temperature distribution and resistance changes during the heating cycle. Additionally, is presented a PWM based control system providing the stability of power and temperature distribution. |
