Microstructure and Mechanical Properties of Multilayered α-AlN/α-BCN Coatings Depending on Flux Density During Target B4C Sputtering
Fragment książki (Rozdział monografii pokonferencyjnej)
MNiSW
20
Poziom I
| Status: | |
| Autorzy: | Ivashchenko Volodymyr I., Rogoz Vladyslav M., Kołtunowicz Tomasz, Kupchishin Anatoliy I. |
| Dyscypliny: | |
| Aby zobaczyć szczegóły należy się zalogować. | |
| Wersja dokumentu: | Drukowana | Elektroniczna |
| Arkusze wydawnicze: | 0,56 |
| Język: | angielski |
| Strony: | 51 - 60 |
| Scopus® Cytowania: | 3 |
| Bazy: | Scopus |
| Efekt badań statutowych | NIE |
| Materiał konferencyjny: | NIE |
| Publikacja OA: | NIE |
| Abstrakty: | angielski |
| Multilayered AlN/BCN coatings with nanoscale layers were fabricated by magnetron sputtering of Al and B4C targets on Si substrate. Deposited amorphous AlN/BCN coatings have demonstrated increased nano- and Knoop hardnesses, Young’s modulus in compare with AlN and BCN coatings, which explained by strain modulation in amorphous layers of AlN and BCN. The application of flux density IB4C (100 mA) has led to significant increasing of hardness from 18 to 27 GPa due to the formation of α-BCN phase according to Fourier spectra. Nanolayered coatings have been thermally stable up to 600 °C due to the slow diffusion processes in amorphous sublayer, which indicates higher oxidation resistance then nanocrystalline. |
