Growth morphology and phase composition of hierarchically self-organized oxyspinel composite films deposited by radio frequency magnetron sputtering
Artykuł w czasopiśmie
MNiSW
100
Lista 2021
| Status: | |
| Autorzy: | Sagan Piotr, Hadzaman Ivan, Popovych Volodymyr, Mroczka Robert, Krzyszczak Agnieszka, Wiertel Marek, Chocyk Dariusz |
| Dyscypliny: | |
| Aby zobaczyć szczegóły należy się zalogować. | |
| Rok wydania: | 2022 |
| Wersja dokumentu: | Drukowana | Elektroniczna |
| Język: | angielski |
| Numer czasopisma: | 17 |
| Wolumen/Tom: | 48 |
| Strony: | 25236 - 25245 |
| Web of Science® Times Cited: | 0 |
| Scopus® Cytowania: | 0 |
| Bazy: | Web of Science | Scopus |
| Efekt badań statutowych | NIE |
| Finansowanie: | The research was performed in the frame of grant Miniatura 1, No. DEC-2017/01/X/ST5/00923 financed by the National Science Center, Poland, and grant “Architectonics of the active media of the elements of light-emitting systems: properties, hierarchical and interface self-organization” № ДР 0120U102217 financed by the Ministry of Education and Science of Ukraine from the general fund of the national budget. |
| Materiał konferencyjny: | NIE |
| Publikacja OA: | NIE |
| Abstrakty: | angielski |
| Multicomponent Al0.1Si0,05Ti0,1Mn1.45Co0.7Ni0.6O4 oxyspinel solid solution ceramics was synthesized to be subsequently used as a target for the deposition of thin films onto silicon and metallized silicon substrates by means of radio frequency sputtering method. Temporal evolution of chemical and phase compositions of the deposited layers, as well as their structure and surface morphology for the different substrate temperatures, have been systematically investigated using energy dispersive X-ray (EDS) analysis, secondary ion mass spectroscopy (SIMS) profiling, Raman spectroscopy, and atomic force microscopy (AFM). The samples revealed a uniform chemical composition throughout their whole depth, corresponding well with the formula unit of the spinel. Across the film depth, progressive developing of a self-organized, two-scale hierarchical composite structure was observed, which is composed of the main oxide grains decorated with spinel nanocrystallites. |
