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This study was funded by the Government Office of the Slovak Republic through the NextGenerationEU: Recovery and Resilience Plan for Slovakia (Grants No. 09I03-03-V01-00026, 09I03-03-V01-00027, and 09I03-03-V01-00067) and by the Slovak Research and Development Agency (Grany No. APVV-21-0231) and supported by the Ministry of Science and Higher Education (Poland) for the Lublin University of Technology for activities in Automation, Electronics, Electrical Engineering, and Space Technology (Grants No. FD-20/EE-2/701 and FD-20/EE-2/703) and for activities in Mechanical Engineering (Grants No. FD-20/IM-5/012 and FD-20/IM-5/051).
This study investigates the phase composition, microstructure, and their influence on
the properties of Mo-W-C nanocomposite films deposited by dual-source magnetron sputtering.
The synthesised films consist of metal carbide nanograins embedded in an amorphous carbon
matrix. It has been found that nanograins are composed of the hexagonal β-(Mo2 + W2)C phase at
a low carbon source power. An increase in the power results in the change in the structure of the
carbide nanoparticles from a single-phase to a mixture of the β-(Mo2 + W2)C and NaCl-type α-(Mo
+ W)C(0.65≤k≤1) solid-solution phases. The analysis of electrical properties demonstrates that the
nanograin structure of the films favours the occurrence of hopping conductivity. The double-phase
structure leads to a twofold increase in the relaxation time compared to the single-phase one. Films
with both types of nanograin structures exhibit tunnelling conductance without the need for thermal
activation. The average distance between the potential wells produced by the carbide nanograins
in nanocomposite films is approximately 3.4 ± 0.2 nm. A study of tribomechanical properties
showed that Mo-W-C films composed of a mixture of the β-(Mo2 + W2)C and α-(Mo + W)C(0.65≤k≤1)
phases have the highest hardness (19–22 GPa) and the lowest friction coefficient (0.15–0.24) and wear
volume (0.00302–0.00381 mm2). Such a combination of electrical and tribomechanical properties
demonstrates the suitability of Mo-W-C nanocomposite films for various micromechanical devices
and power electronics.
