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Thin (3 µm) polyethylene terephthalate (PET) foils were irradiated with 135 keV He
+
, Ne
+
and Ar
+
ions
with the fluences up to 5 × 10
15
cm
−2
. Changes of chemical structure of the polymer were studied with the Fourier
transform infrared and Raman spectroscopy — breaking of numerous chemical bonds, polymer chain cross-linking
as well as formation of sp
2
hybridised carbon clusters and cluster networks were demonstrated. The increase of
the implanted sample absorbance with the implantation fluence in the UV-VIS spectra as well as the decrease of
optical band-gap energy (2.75 and 2.0 eV for He and Ne, respectively, at 5 × 10
15
cm
−2
) are observed. Decrease
of bulk resistance of heavily treated samples by ≈ 5 orders of magnitude is determined. Measurements of the
sheet resistance confirm that the sample becomes conducting also on the reverse (unimplanted) side of the foil.
Both of these effects depend on the impinging ion mass — they are the strongest for Ar. The increase of both ac
conductance and dielectric constant is observed in the frequency range up to 2 MHz and these changes rise with
the impinging ion mass.