Features of the formation of structure and properties of transition metals boridonitrides composite films
Fragment książki (Materiały konferencyjne)
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| Status: | |
| Autorzy: | Goncharov Alexander A., Yunda Andrey N., Kołtunowicz Tomasz |
| Wersja dokumentu: | Drukowana | Elektroniczna |
| Arkusze wydawnicze: | 0.5 |
| Język: | angielski |
| Web of Science® Times Cited: | 0 |
| Scopus® Cytowania: | 0 |
| Bazy: | Web of Science | Scopus | Web of Science Core Collection | EBSCO | INSPEC | SPIE Digital Library |
| Efekt badań statutowych | NIE |
| Materiał konferencyjny: | TAK |
| Nazwa konferencji: | 8th International Conference on Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies (ATOM-N) |
| Termin konferencji: | 25 sierpnia 2016 do 28 sierpnia 2016 |
| Miasto konferencji: | Constanta |
| Państwo konferencji: | RUMUNIA |
| Publikacja OA: | NIE |
| Abstrakty: | angielski |
| Researches of formation features of nanostructured film condensates deposited by reactive magnetron (HF and DC) sputtering of transition metals diborides targets was analyzed. Amorphous-crystalline composite film (MeB2 + BN), consisting of grains of nanocrystalline phase MeB2 and amorphous graphite-like phase BN filling intergranular space, is formed at reactive sputtering in (Ar + N2) mixture. Investigations of composition and physico-mechanical properties of transition metals boridenitrides composite films were carried out. The amount of phase МеВ2 decreases, and phase BN enlarges with an increase in percentage content of nitrogen in a mixture, that leads to hardness and elastic modulus reduction respectively and to elasticity increase of boridonitrides thin films compared with diborides films. It is shown that viscoelasticity of Me–B–N thin films is caused by the presence of amorphous boron nitride phase. © (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only. |
